Wafer-scale integration of alpha-quartz thin films towards super high frequency piezoelectric bioNEMS for arbovirus detection
Raïssa Rathar, Sijie Ding, David Sánchez‐Fuentes, Claire Jolly, Charlotte André-Arpin, Rudy Desgarceaux, Nicolas Guillaume, Gustavo Ardila, Ricardo Garcia‐Bermejo, Jaume Gàzquez, Sergi Plana‐Ruiz, Laura Picas, Adrián Carretero‐Genevrier
This paper develops wafer-scale epitaxial alpha-quartz thin films for high-frequency piezoelectric bioNEMS to detect arboviruses with high sensitivity and low detection limits.
Advanced Functional Materials · Jul 16, 2025Peer-reviewedBioengineering